Question: A polysilicon lateral microactuator is shown in Figure 2 below. Given that the material Young's modulus (E) is 160GPa, and density is 2330 kg/m.

A polysilicon lateral microactuator is shown in Figure 2 below. Given that

A polysilicon lateral microactuator is shown in Figure 2 below. Given that the material Young's modulus (E) is 160GPa, and density is 2330 kg/m. 40 m 100 m 2 m 5m Top View 100 m Side View 40 m + Vact 20 m 40 m Y-axis Figure 2 a. Calculate the suspension compliance (k) along the Y-axis and actuator mechanical resonant frequency. b. An actuation voltage Vact is applied across the two electrodes in black color. What Vact does it take in order to deflect the suspended electrode by lum? Calculate the actuation voltage required to pull the suspended electrode onto the other fixed electrode? (think pull- in)

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