A polysilicon lateral microactuator is shown in Figure 2 below. Given that the material Young's modulus...

 

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A polysilicon lateral microactuator is shown in Figure 2 below. Given that the material Young's modulus (E) is 160GPa, and density is 2330 kg/m³. 40 μm 100 μm 2 μm 5µm Top View 100 μm Side View 40 μm + Vact 20 μm 40 μm Y-axis Figure 2 a. Calculate the suspension compliance (k) along the Y-axis and actuator mechanical resonant frequency. b. An actuation voltage Vact is applied across the two electrodes in black color. What Vact does it take in order to deflect the suspended electrode by lum? Calculate the actuation voltage required to pull the suspended electrode onto the other fixed electrode? (think pull- in) A polysilicon lateral microactuator is shown in Figure 2 below. Given that the material Young's modulus (E) is 160GPa, and density is 2330 kg/m³. 40 μm 100 μm 2 μm 5µm Top View 100 μm Side View 40 μm + Vact 20 μm 40 μm Y-axis Figure 2 a. Calculate the suspension compliance (k) along the Y-axis and actuator mechanical resonant frequency. b. An actuation voltage Vact is applied across the two electrodes in black color. What Vact does it take in order to deflect the suspended electrode by lum? Calculate the actuation voltage required to pull the suspended electrode onto the other fixed electrode? (think pull- in)

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a The suspension compliance along the Yaxis can be calculated using the following equation k E AL wh... View the full answer