Question: orrect Question 10 0/1 pts Name the phenomenon that occurs when implanting at an angle and 3-dimensional features on the wafer surface interfere with the

orrect Question 10 0/1 pts Name the phenomenon that occurs when

orrect Question 10 0/1 pts Name the phenomenon that occurs when implanting at an angle and 3-dimensional features on the wafer surface interfere with the ion entry? Beam depression Straggle Shadowing Beamline interdigitation O lonic reflections and re-implantation

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