Question: 6.13. Continuation of Problem 6.12. Use the regression model in part (c) of Problem 6.12 to generate a response surface contour plot for epitaxial layer

6.13. Continuation of Problem 6.12. Use the regression model in part

(c) of Problem 6.12 to generate a response surface contour plot for epitaxial layer thickness. Suppose it is critically important to obtain layer thickness of 14.5$m. What settings of arsenic flow rate and decomposition time would you recommend?

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