Question: (a) A frequently used empirical approximation for the yield of an IC process as a function of die size is Yws = exp (A/A0) where

(a) A frequently used empirical approximation for the yield of an IC process as a function of die size is Yws = exp (ˆ’A/A0) where A is the die area and A0 is a constant. Using Fig. 2.68, determine approximate values of A0 for each of the three processes shown. Use the point on the curve at which the yield is e ˆ’1 to determine A0. Plot the yield predicted by this expression and compare with the curves shown in Fig. 2.68.


Fig. 2.68.

100 80 60 40 Process A 10 Process B 4 Process C 10 20 30 40 50 60 70 80 90 100 Die size (mil? x 10) Yws (yield, %) 2.


(b) Use the expression derived in (a), together with the gross-die-per-wafer curves shown in Fig. 2.69, to develop an analytical expression for the cost of silicon per unit area as a function of die size, Ydf , Yft , Cp, and Cw for each of the three processes A,B, and C.


Fig. 2.69.

100,000 12

100 80 60 40 Process A 10 Process B 4 Process C 10 20 30 40 50 60 70 80 90 100 Die size (mil? x 10) Yws (yield, %) 2. 100,000 12" Diameter wafer 10,000 8" Diameter wafer 4" Diameter wafer 1,000 100 10 103 104 105 Die size (mil?) 106 107 Gross die/wa fer

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