A central composite design is run in a chemical vapor deposition process, resulting in the experimental data

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A central composite design is run in a chemical vapor deposition process, resulting in the experimental data shown on the next page. Four experimental units were processed simultaneously on each run of the design, and the responses are the mean and variance of thickness, computed across the four units.

X2 -1 -1 360.6 6.689 1 -1 445.2 14.230 -1 1 412.1 7.088 1 1 601.7 8.586 1.414 518.0 13.130 -1.414 411.4 6.644 1.414 497.6 7.649 -1.414 397.6 11.740 530.6 7.836 495.4 9.306 510.2 7.956 487.3 9.127


(a) Fit a model to the mean response. Analyze the residuals.

(b) Fit a model to the variance response. Analyze the residuals.

(c) Fit a model to ln(s2). Is this model superior to the one you found in part (b)?

(d) Suppose you want the mean thickness to be in the interval 450 ± 25. Find a set of operating conditions that achieve this objective and simultaneously minimize the variance.

(e) Discuss the variance minimization aspects of part (d). Have you minimized the total process variance?

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