Question: 4 . 3 A boron diffusion inlD a l - ohm cm 'Hype wafer results in a Gaussian profile with 8 surface concentration of 5
A boron diffusion inlD a lohmcm 'Hype wafer results in a Gaussian profile with surface
concentration of X l QIcm and a junction depth of JIm
II How long did the diffusion take if the diffusion temperature was el
b What was the sheet resistance of the layer?
c What is the dose in the layer?
d The boron dose was deposited by a solidsolubilitylimited diffusion. Design a diffusion
schedule temperature and time for this predeposition st
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