Question: A silicon wafer, doped p - type, is initially coated with a 0 . 3 5 m thick oxide across the entire wafer. Two openings
A silicon wafer, doped type, is initially coated with a thick oxide across the entire wafer. Two openings are made in the oxide following a photolithography and etching step. The exposed silicon below the two openings is next doped type. Lastly, a thick oxide is grown on the bare parts of the wafer.
a If the oxide was grown using dry at how long would it take to grow the oxide over the bare parts of the wafer? DealGrove parameters are on Canvas in the file called 'SiOxidationDealGrove.pdf
b If torr of wet was used at how long would it take to grow the oxide over the bare parts of the wafer?
c Thinking about the regions of the wafer still covered by thick oxide, what would the total oxide thickness be following an oxidation process using dry at for hrs
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