Question: A silicon wafer, doped p - type, is initially coated with a 0 . 3 5 m thick oxide across the entire wafer. Two openings

A silicon wafer, doped p-type, is initially coated with a 0.35m thick oxide across the entire wafer. Two openings are made in the oxide following a photolithography and etching step. The exposed silicon below the two openings is next doped n-type. Lastly, a 0.25m thick oxide is grown on the bare parts of the wafer.
a. If the oxide was grown using dry O2 at 1100C, how long would it take to grow the oxide over the bare parts of the wafer? Deal-Grove parameters are on Canvas in the file called 'SiOxidationDealGrove.pdf'
b. If 640 torr of wet O2 was used at 1100C, how long would it take to grow the oxide over the bare parts of the wafer?
c. Thinking about the regions of the wafer still covered by 0.35m thick oxide, what would the total oxide thickness be following an oxidation process using dry O2 at 1200C for 6.0 hrs?
A silicon wafer, doped p - type, is initially

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