Question: An n + poly - Si gate CMOS process uses an n - type substrate with a doping of 1 0 1 6 / cm

An n+ poly-Si gate CMOS process uses an n-type substrate with a doping of 1016/cm3. An implant/drive in schedule will be used to form a p-well with a net surface concentration of 1017/cm3 and a junction depth of 3 m. Assume that a final surface concentration of 1.1x1017/cm3 is required to produce a net concentration of 1x1017/cm3 at the surface from the Irvins curve. (for B, Do=10.5 cm2/sec and Ea=3.69eV)(a) What is the drive-in time at 1150C?(b) Determine the implanted dose in silicon. (c) Calculate the threshold voltage of the n- and p-channel transistors if the oxide thickness is 5 nm?

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