Question: Q1. A TiW layer is deposited on a substrate using a sputtering tool. Table contains layer thickness measurements (in Angstroms) on 20 subgroups of four
Q1. A TiW layer is deposited on a substrate using a sputtering tool. Table contains layer thickness measurements (in Angstroms) on 20 subgroups of four substrates.
(a) Set up and R control charts on this process. Is the process in control? Revise the control limits as necessary.
(b) Estimate the mean and standard deviation of the process.
(c) If the specifications are at 450 30, estimate fraction defectives.
| Subgroup | x1 | x2 | x3 | x4 |
| 1 | 459 | 449 | 435 | 450 |
| 2 | 443 | 440 | 442 | 442 |
| 3 | 457 | 444 | 449 | 444 |
| 4 | 469 | 463 | 453 | 438 |
| 5 | 443 | 457 | 445 | 454 |
| 6 | 444 | 456 | 456 | 457 |
| 7 | 445 | 449 | 450 | 445 |
| 8 | 446 | 455 | 449 | 452 |
| 9 | 444 | 452 | 457 | 440 |
| 10 | 432 | 463 | 463 | 443 |
| 11 | 445 | 452 | 453 | 438 |
| 12 | 456 | 457 | 436 | 457 |
| 13 | 459 | 445 | 441 | 447 |
| 14 | 441 | 465 | 438 | 450 |
| 15 | 460 | 453 | 457 | 438 |
| 16 | 453 | 444 | 451 | 435 |
| 17 | 451 | 460 | 450 | 457 |
| 18 | 422 | 431 | 437 | 429 |
| 19 | 444 | 446 | 448 | 467 |
| 20 | 450 | 450 | 454 | 454 |
(d) Table below contains 10 new subgroups of thickness data. Plot this data on the control charts constructed earlier. Is the process in statistical control?
| Subgroup | x1 | x2 | x3 | x4 |
| 21 | 454 | 449 | 443 | 461 |
| 22 | 449 | 441 | 444 | 455 |
| 23 | 442 | 442 | 442 | 450 |
| 24 | 443 | 452 | 438 | 430 |
| 25 | 446 | 459 | 457 | 457 |
| 26 | 454 | 448 | 445 | 462 |
| 27 | 458 | 449 | 453 | 438 |
| 28 | 450 | 449 | 445 | 451 |
| 29 | 443 | 440 | 443 | 451 |
| 30 | 457 | 450 | 452 | 437 |
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