Question: Q1. A TiW layer is deposited on a substrate using a sputtering tool. Table contains layer thickness measurements (in Angstroms) on 20 subgroups of four

Q1. A TiW layer is deposited on a substrate using a sputtering tool. Table contains layer thickness measurements (in Angstroms) on 20 subgroups of four substrates.

(a) Set up and R control charts on this process. Is the process in control? Revise the control limits as necessary.

(b) Estimate the mean and standard deviation of the process.

(c) If the specifications are at 450 30, estimate fraction defectives.

Subgroup x1 x2 x3 x4
1 459 449 435 450
2 443 440 442 442
3 457 444 449 444
4 469 463 453 438
5 443 457 445 454
6 444 456 456 457
7 445 449 450 445
8 446 455 449 452
9 444 452 457 440
10 432 463 463 443
11 445 452 453 438
12 456 457 436 457
13 459 445 441 447
14 441 465 438 450
15 460 453 457 438
16 453 444 451 435
17 451 460 450 457
18 422 431 437 429
19 444 446 448 467
20 450 450 454 454

(d) Table below contains 10 new subgroups of thickness data. Plot this data on the control charts constructed earlier. Is the process in statistical control?

Subgroup x1 x2 x3 x4
21 454 449 443 461
22 449 441 444 455
23 442 442 442 450
24 443 452 438 430
25 446 459 457 457
26 454 448 445 462
27 458 449 453 438
28 450 449 445 451
29 443 440 443 451
30 457 450 452 437

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