Question: Sketch the plot that a stylus-profilometer would produce if the stylus is scanned along the etched oxide layer (fabricated using the scheme below with
Sketch the plot that a stylus-profilometer would produce if the stylus is scanned along the etched oxide layer (fabricated using the scheme below with a positive photoresist). Note that the transparent glass and opaque chrome structure below the photoresist- coated silicon wafer represents the photolithography mask. Si Glass Chrome PR Oxide
Step by Step Solution
There are 3 Steps involved in it
Negative PR 1 Exposed to uv light or Xray Glass Exposed ... View full answer
Get step-by-step solutions from verified subject matter experts
