this is dataset

https://1drv.ms/x/s!AsX4xuU9Gr0ogRZWJFe2IDJ_MZBd

In r programming i need code

An experiment is conducted to determine the effect of CgFG ow rate on the uniformity of the etch on a silicon wafer used in integrated circuit manufacturing. Three ow rates are used in the experiment, and the resulting uniformity (in percent) for six replicates is shown below. (Data is also provided in the excel data le.) Observations 02E; Flow 1 2 3 4 5 6 125 2.7 3.6 2.6 3 3.2 3.8 160 4.9 4.6 5 4.8 3.6 4.2 250 4.6 3.4 2.9 3.8 4.1 5.1 (a) Does CZFS ow rate affect etch uniformity? Construct box plots to compare the factor levels and perform the analysis of variance. Use oz : 0.05. (b) Check the homogeneity of variances and normality of residuals. Do the residuals indi cate any problems with the underlying assumptions? (c) Use Fisher's LSD method with a: = 0.05 test to analyze the means of the three ow rates. ((1) Suppose that the true mean for uniformity (in percent) on the indicated 02E; ow rates (125, 160, 250) are 3.3, 4.4, 4.0, respectively. Moreover, assume 02 2 0.5. Then, how much is the probability of detecting the effect of 02E; ow rate on etch uniformity in this experiment? Use oz : 0.05