Question: Using the values in Table 6 . 3 for surface diffusion on ( 1 0 0 ) Si , calculate the values for Ds (
Using the values in Table for surface diffusion on Si calculate the values for Ds cmsec and tau sec at deg C How long would it take for an atom to diffuse cm cm Compare these values with
TABLE Growth Parameters on Si with vsec Gs eV and Gdes eV
deg C kT eV: Ds cmsec: x tsec: xlambda epsi mu m:
deg C kT eV: Ds cmsec: x tsec: xlambda epsi mu m:
deg C kT eV: Ds cmsec: x tsec: xlambda epsi mu m:
deg C kT eV: Ds cmsec: x tsec: xlambda epsi mu m:
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