Question: Statistics and Probability (b) A TiW layer is deposited on a substrate using a sputtering tool. The table below contains layer thickness measurements (in angstroms)

Statistics and Probability

Statistics and Probability (b) A TiW layer is

(b) A TiW layer is deposited on a substrate using a sputtering tool. The table below contains layer thickness measurements (in angstroms) on 20 subgroups of four substrates. Setup X and R control charts on this process. Comment whether the process is in control or not. Revise the control limits as necessary and assume all the assignable cause was identified. All your answers should be rounded to 4 decimal places. (14 marks) [Total : 25 marks] Subgroup 1 2 3 4 5 6 7 8 9 10 X1 459 443 457 469 443 444 445 446 444 432 X2 449 440 444 463 457 456 449 X3 435 442 449 453 445 456 450 449 457 463 X4 450 442 444 438 454 457 445 452 440 443 Subgroup 11 12 13 14 15 16 17 18 19 20 X1 445 456 459 441 460 453 451 422 444 450 X2 452 457 445 465 453 444 460 431 446 450 X3 453 436 441 438 457 451 450 437 448 454 X4 438 457 447 450 438 435 457 429 467 454 455 452 463

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